半導(dǎo)體備件
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愛銳精密科技（大連）有限公司提供以下列表的半導(dǎo)體設(shè)備新品備件。有需求請(qǐng)向我司咨詢。
半導(dǎo)體用備件，SEMICONDUCTOR SPARE PARTS
| Item | Equipment | Part Name | Process | SIZE | Oem P/N? | Material | Note |
| 1 | Lam | Focus Ring | Etch | 6 | 715-011640-005 | AL-6061-T6 | |
| 2 | Lam | Upper Electrode | Etch | 6 | 715-011531-002 | AL-6061-T6 | |
| 3 | Lam | Upper Electrode | Etch | 6 | 715-011639-006 | AL-6061-T6 | Rainbow R47 |
| 4 | Lam | Upper Electrode | Etch | 8 | 715-018991-208 | AL-6061-T6 | Rainbow R4420 |
| 5 | Lam | UPPER ELECTROD | Etch | 8 | 715-011531-008 | AL-6061-T6 | Rainbow R42 |
| 6 | Lam | EXELAN | Etch | 12 | 713-037048-001C | PEEK | |
| 7 | Lam | FLEX | Etch | 12 | 713-037072-003C | PEEK | |
| 8 | Lam | EXELAN ASSY | Etch | 12 | 839-039317-003 | PEEK | |
| 9 | Lam | EXELAN WSHR | Etch | 12 | 713-034964-001 | PEEK | |
| 10 | Lam | EXELAN PAD | Etch | 12 | 713-034965-001 | PEEK | |
| 11 | Lam | EXELAN HANGER | Etch | 12 | 713-037069-003D | PEEK | |
| 12 | Lam | GDP | Etch | 12 | 715-801916-003 | repair | |
| 13 | Lam | GDP | Etch | 12 | 715-801916-008 | AL-6061-T6 | repair |
| 14 | Lam | GDP SWITCH | Etch | 12 | 796-098654-002 | AL-6061-T6 | Etch-Metal |
| 15 | Lam | GDP COVER | Etch | 12 | 796-098655-002 | AL-6061-T6 | Etch-Metal |
| 16 | Tegal | ELECTRODE UPPER | Etch | 6 | 37-221-003 | AL-6061-T6 | |
| 17 | Tegal | ELECTRODE UPPER | Etch | 6 | 37-221-001 | AL-6061-T6 | |
| 18 | TEL | Cooling Plate | 6 | AL-6061-T6 | |||
| 19 | TEL | Upper? Electrode | Etch | 8 | 1D10-204338-13 | AL-6061-T6 | DRM? for Chartered |
| 20 | TEL | Shield Depo (SHIELD DEEP) | Etch | 8 | 1D10-315183-15 | AL-6061-T6 | DRM? for Chartered |
| 21 | TEL | Window Shield Depo | Etch | 8 | 1D10-315182-12 | AL-6061-T6 | DRM? for Chartered |
| 22 | TEL | ?Cover Bellow(COVER BELLOWS A-2) | Etch | 8 | 1D10-204418-12 | AL-6061-T6 | DRM? for Chartered |
| 23 | TEL | ?Beffle Plate M-9 | Etch | 8 | 1D10-102848-13 | AL-6061-T6 | DRM? for Chartered |
| 24 | TEL | Upper Electrode/Vespel (IBM) | Etch | 8 | 1D10-202204-12 | AL-6061-T6 | |
| 25 | TEL | Upper Electrode? | Etch | 8 | 1D10-100670-13 | AL-6061-T6 | |
| 26 | TEL | Baffle Plate | Etch | 8 | 1D10-101475-11 | AL-6061-T6 | |
| 27 | TEL | Baffle Plate /IBM | Etch | 8 | 1D10-101551-11 | AL-6061-T6 | |
| 28 | TEL | Cover Bellow - A | Etch | 8 | 1D10-202988-11 | AL-6061-T6 | |
| 29 | TEL | Shield Depo | Etch | 8 | 1D10-303124-21 | AL-6061-T6 | |
| 30 | TEL | WINDOW DEP P-1 (HOLE) | Etch | 8 | 1D10-309697-11 | AL-6061-T6 | |
| 31 | TEL | WINDOW SHIELD DEPO (DRM2) | Etch | 8 | 1D05-400022-14 | AL-6061-T6 | |
| 32 | ASM | Shower Head | 8 | 70055-00907-E | AL-6061-T6 | ||
| 33 | ASM | Shower Plate | 12 | 73055-70805A | AL-6061-T6 | ||
| 34 | ASM | Plate Blocker | 8 | 70055-70656C | AL-6061-T6 |
KEYWORDS：提供半導(dǎo)體用備件，SEMICONDUCTOR SPARE PARTS
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